A clean room as a working space:
In the production process of micro- and nanostructures the details of design are on a scale where even a dust particle is a giant. This type of work can only be carried out in facilities where the air is extremely clean. Clean room space of more than 200 m2 is available for the use of the InFotonics Center.
The clean room environment contains the following instruments:
- Electron beam pattern generator Leica LION LVI
- Reactive ion etching machines
- Photoresist spinner
- Electroplating system
- Contact mask aligner
- Scanning electron microscope (SEM)
- Atomic force microscope (AFM)
- Interferometric UV-laser exposure system
Benefits enabled by the nanosize range:
The propagation of light can be modified by means of micro- and nanostructures. A single element can perform several optical functions. The small size and light weight of the optical elements facilitate, for example, efficient packaging. Minimal details smaller than the wavelength of light can enhance such aspects as product security.
Visual effect produced by microstructures.