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Wave-optical engineering

Wave-optical engineering exploits the wave nature of light allowing controlling of electromagnetic field with microstructures. Even complex optical functions can be implemented by fabricating components with features of the size of the wavelength. They can be applied in the shaping, splitting and directing of light.


The service process in wave-optical engineering extends from the feasibility analysis to the manufacture and testing of a prototype element. An assignment for a service process may be an optical function or measuring service specified by the customer.

A clean room as a working space:
In the production process of micro- and nanostructures the details of design are on a scale where even a dust particle is a giant. This type of work can only be carried out in facilities where the air is extremely clean. Clean room space of more than 200 m2 is available for the use of the InFotonics Center.

The clean room environment contains the following instruments:
  • Electron beam pattern generator Leica LION LVI
  • Sputter
  • Reactive ion etching machines
  • Photoresist spinner
  • Electroplating system
  • Contact mask aligner
  • Scanning electron microscope (SEM)
  • Atomic force microscope (AFM)
  • Profilometer
  • Ellipsometer
  • Interferometric UV-laser exposure system

Benefits enabled by the nanosize range:
The propagation of light can be modified by means of micro- and nanostructures. A single element can perform several optical functions. The small size and light weight of the optical elements facilitate, for example, efficient packaging. Minimal details smaller than the wavelength of light can enhance such aspects as product security.

Visual effect produced by microstructures.




Images taken with a scanning electron microscope (SEM) of a binary, multi-level and continuous grating structure.




Department of Computer Science and Statistics
Department of Physics and Mathematics